Structural and electrical properties of LiCoO2 thin-film cathodes deposited on planar and trench structures by liquid-delivery metalorganic chemical vapour deposition

被引:49
作者
Choi, WG [1 ]
Yoon, SG [1 ]
机构
[1] Chungnam Natl Univ, Dept Mat Engn, Taejon 305764, South Korea
关键词
LDMOCVD; LiCoO2 thin films; step-coverage; trench-structure; discharge-capacity; Pt collector;
D O I
10.1016/j.jpowsour.2003.08.014
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The electrochemical properties of annealed-LiCoO2 cathodes deposited on planar and trench structures by liquid-delivery metalorganic chemical vapor deposition are investigated for various deposition temperatures and input Li:Co mole ratios. With the planar structure, the best crystallinity of the films is obtained at a deposition temperature of 450 degreesC and an input Li:Co mole ratio of 1.0. The deposition window for optimum initial discharge capacity and capacity retention is a deposition temperature of 450-500 degreesC and an input Li:Co mole ratio of 1.0, and an input Li:Co mole ratio of 1.0-1.2 at a deposition temperature of 450degreesC. The initial discharge capacity and capacity retention of LiCoO2 thin films deposited with an input Li:Co mole ratio of 1.2 at 450degreesC are approximately 25 muAh/cm(2) mum and 77%, respectively. The initial discharge capacity of films deposited on a trench structure shows an increase of approximately 130% compared with that of films deposited on a planar structure with an input Li:Co mole ratio of 1.2. The rechargeabilities of films deposited in a trench structure are inferior to those in a planar structure because conformal growth in the trench structure is poor. Thus, a trench structure can improve the initial discharge capacity and capacity retention of lithium microbatteries. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码:236 / 241
页数:6
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