325-nm interference microscope

被引：15

作者：

Chang, FC ^{[1
]}

Kino, GS ^{[1
]}

机构：

[1] Stanford Univ, Edward L Ginzton Lab, Stanford, CA 94305 USA

来源：

APPLIED OPTICS | 1998年 / 37卷 / 16期

关键词：

D O I：

10.1364/AO.37.003471

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We first discuss an interference microscope's 3D response in terms of Richards and Wolf's vector theory. We then report the results we obtained with a 325-nm interference microscope using an ultraviolet transparent beam splitter, short-working-distance Mirau interferometer. The microscope performs at near-ideal definitions with a measured FWHM of the intensity spot at 0.14 mu m and a FWHM of the depth envelope intensity at 0.25 mu m. Feasibility of a shorter wavelength system operating at 248 nm is demonstrated. (C) 1998 Optical Society of America.

引用

页码：3471 / 3479

页数：9

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