PHASE MEASUREMENTS USING THE MIRAU CORRELATION MICROSCOPE

被引：38

作者：

CHIM, SSC

KINO, GS

机构：

[1] Stanford University, Edward L. Ginzton Laboratory, Stanford, CA

来源：

APPLIED OPTICS | 1991年 / 30卷 / 16期

关键词：

D O I：

10.1364/AO.30.002197

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new algorithm for extracting amplitude and phase information from the data collected by the Mirau correlation microscope is presented. The accuracy of the phase measurements is first determined by measuring phase steps and vertical resolutions in the nanometer range. Experimental results with metal gratings show good agreement with Fourier theory. An inverse filter is then used to improve the resolution of the system. The filtered image has sharper edges and better phase contrast.

引用

页码：2197 / 2201

页数：5

共 11 条

[1] CALIBRATION REQUIREMENTS FOR MIRAU AND LINNIK MICROSCOPE INTERFEROMETERS [J].