Femtosecond laser micromachining in transparent materials

被引：2692

作者：

Gattass, Rafael R.

Mazur, Eric

机构：

[1] Harvard Univ, Dept Phys, Cambridge, MA 02138 USA

[2] Harvard Univ, Sch Engn & Appl Sci, Cambridge, MA 02138 USA

来源：

NATURE PHOTONICS | 2008年 / 2卷 / 04期

关键词：

D O I：

10.1038/nphoton.2008.47

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Femtosecond laser micromachining can be used either to remove materials or to change a material's properties, and can be applied to both absorptive and transparent substances. Over the past decade, this technique has been used in a broad range of applications, from waveguide fabrication to cell ablation. This review describes the physical mechanisms and the main experimental parameters involved in the femtosecond laser micromachining of transparent materials, and important emerging applications of the technology.

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页码：219 / 225

页数：7

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