Recent advances in pulsed-laser deposition of complex oxides

被引:248
作者
Christen, H. M. [1 ]
Eres, G. [1 ]
机构
[1] Oak Ridge Natl Lab, Div Mat Sci & Technol, Oak Ridge, TN 37831 USA
关键词
D O I
10.1088/0953-8984/20/26/264005
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Pulsed-laser deposition (PLD) is one of the most promising techniques for the formation of complex-oxide heterostructures, superlattices, and well controlled interfaces. The first part of this paper presents a review of several useful modifications of the process, including methods inspired by combinatorial approaches. We then discuss detailed growth kinetics results, which illustrate that 'true' layer-by-layer (LBL) growth can only be approached, not fully met, even though many characterization techniques reveal interfaces with unexpected sharpness. Time-resolved surface x-ray diffraction measurements show that crystallization and the majority of interlayer mass transport occur on timescales that are comparable to those of the plume/substrate interaction, providing direct experimental evidence that a growth regime exists in which non-thermal processes dominate PLD. This understanding shows how kinetic growth manipulation can bring PLD closer to ideal LBL than any other growth method available today.
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页数:16
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共 137 条
[1]   ORIGIN OF RHEED INTENSITY OSCILLATIONS DURING THE GROWTH OF (Y,DY)BA2CU3O7-X THIN-FILMS [J].
ACHUTHARAMAN, VS ;
CHANDRASEKHAR, N ;
VALLS, OT ;
GOLDMAN, AM .
PHYSICAL REVIEW B, 1994, 50 (11) :8122-8125
[2]   DYNAMIC SCALING OF THE ISLAND-SIZE DISTRIBUTION AND PERCOLATION IN A MODEL OF SUBMONOLAYER MOLECULAR-BEAM EPITAXY [J].
AMAR, JG ;
FAMILY, F ;
LAM, PM .
PHYSICAL REVIEW B, 1994, 50 (12) :8781-8797
[3]  
BASTING D, 2001, EXCIMER LASER TECHNO
[4]   In-situ monitoring by reflective high energy electron diffraction during pulsed laser deposition [J].
Blank, DHA ;
Rijnders, GJHM ;
Koster, G ;
Rogalla, H .
APPLIED SURFACE SCIENCE, 1999, 138 :17-23
[5]  
Blank DHA, 1999, APPL PHYS A-MATER, V69, pS17
[6]   High-quality surface YBCO thin films prepared by off-axis pulsed laser deposition technique [J].
Boffa, V ;
Petrisor, T ;
Ciontea, L ;
Gambardella, U ;
Barbanera, S .
PHYSICA C, 1997, 276 (3-4) :218-224
[7]   Layer-by-layer growth of GaAs(001) studied by in situ synchrotron X-ray diffraction [J].
Braun, W ;
Jenichen, B ;
Kaganer, VM ;
Shtukenberg, AG ;
Däweritz, L ;
Ploog, KH .
SURFACE SCIENCE, 2003, 525 (1-3) :126-136
[8]   A CLASS OF COBALT OXIDE MAGNETORESISTANCE MATERIALS DISCOVERED WITH COMBINATORIAL SYNTHESIS [J].
BRICENO, G ;
CHANG, HY ;
SUN, XD ;
SCHULTZ, PG ;
XIANG, XD .
SCIENCE, 1995, 270 (5234) :273-275
[9]   Combinatorial synthesis and high throughput evaluation of ferroelectric/dielectric thin-film libraries for microwave applications [J].
Chang, H ;
Gao, C ;
Takeuchi, I ;
Yoo, Y ;
Wang, J ;
Schultz, PG ;
Xiang, XD ;
Sharma, RP ;
Downes, M ;
Venkatesan, T .
APPLIED PHYSICS LETTERS, 1998, 72 (17) :2185-2187
[10]   Surface relaxation of SrTiO3(001) [J].
Charlton, G ;
Brennan, S ;
Muryn, CA ;
McGrath, R ;
Norman, D ;
Turner, TS ;
Thornton, G .
SURFACE SCIENCE, 2000, 457 (1-2) :L376-L380