Characterization of PZT thick films fired on LTCC substrates

被引：30

作者：

Hrovat, M

Holc, J

Drnovsek, S

Belavic, D

Bernard, J

Kosec, M

Golonka, L

Dziedzic, A

Kita, J

机构：

[1] Jozef Stefan Inst, SI-1000 Ljubljana, Slovenia

[2] HIPOT, R&D, SI-8310 Sentjernej, Slovenia

[3] Wroclaw Univ Technol, PL-50370 Wroclaw, Poland

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 2003年 / 22卷 / 17期

关键词：

D O I：

10.1023/A:1025388214955

中图分类号：

T [工业技术];

学科分类号：

08 [工学];

摘要：

The compatibility between low-temperature co-fired ceramic (LTCC) materials and screen-printed Pb(Zr,Ti)O3 (PZT) thick films was studied. Results indicated the diffusion of PbO into the LTCC and of SiO 2 into the PZT during the co-firing of the thick-film structure. A low-permittivity phase on the grain boundaries separated the high-permittivity PZT grains and therefore significantly lowered the dielectric constant of the PZT layer.

引用

页码：1193 / 1195

页数：3

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[3]

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