Rapid prototyping of three-dimensional microfluidic mixers in glass by femtosecond laser direct writing

被引：206

作者：

Liao, Yang ^{[2
]}

Song, Jiangxin ^{[2
]}

Li, En ^{[3
]}

Luo, Yong ^{[1
]}

Shen, Yinglong ^{[2
]}

Chen, Danping ^{[2
]}

Cheng, Ya ^{[2
]}

Xu, Zhizhan ^{[2
]}

Sugioka, Koji ^{[4
]}

Midorikawa, Katsumi ^{[4
]}

机构：

[1] Dalian Univ Technol, Sch Pharmaceut Sci & Technol, Dalian 116024, Peoples R China

[2] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China

[3] Nankai Univ, Coll Phys Sci, Tianjin 300071, Peoples R China

[4] RIKEN, Adv Sci Inst, Laser Technol Lab, Wako, Saitama 3510198, Japan

来源：

LAB ON A CHIP | 2012年 / 12卷 / 04期

基金：

中国国家自然科学基金;

关键词：

DEVICE; CHIP; MICROMIXERS; NETWORKS; CHANNEL; SYSTEMS; SILICA; PULSES;

D O I：

10.1039/c2lc21015k

中图分类号：

Q5 [生物化学];

学科分类号：

071010 ; 081704 ;

摘要：

The creation of complex three-dimensional (3D) microfluidic systems has attracted significant attention from both scientific and applied research communities. However, it is still a formidable challenge to build 3D microfluidic structures with arbitrary configurations using conventional planar lithographic fabrication methods. Here, we demonstrate rapid fabrication of high-aspect-ratio microfluidic channels with various 3D configurations in glass substrates by femtosecond laser direct writing. Based on this approach, we demonstrate a 3D passive microfluidic mixer and characterize its functionalities. This technology will enable rapid construction of complex 3D microfluidic devices for a wide array of lab-on-a-chip applications.

引用

页码：746 / 749

页数：4

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