Integrated wavelength-selective optical MEMS switching using ring resonator filters

被引：49

作者：

Nielson, GN

Seneviratne, D

Lopez-Royo, F

Rakich, PT

Avrahami, Y

Watts, MR

Haus, HA

Tuller, HL

Barbastathis, G

机构：

[1] Sandia Natl Labs, Albuquerque, NM 87185 USA

[2] MIT, Cambridge, MA 02139 USA

[3] Pirelli Labs, I-20126 Milan, Italy

[4] MIT, Cambridge, MA 02139 USA

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2005年 / 17卷 / 06期

关键词：

integrated optics; microelectromechanical devices; optical filters; optical switches;

D O I：

10.1109/LPT.2005.846951

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An integrated optical microelectromechanical system (MEMS) switch that provides wavelength selectivity is. described. The switching mechanism is based on moving a MEMS actuated optically absorbing membrane into the evanescent field of a high-index-contrast optical ring resonator. By controlling the loss, and thus, the cavity quality factor, the resonant wavelength is switched between the drop and through ports.

引用

页码：1190 / 1192

页数：3

共 11 条

[1] Microring-resonator-based add-drop filters in SiN: fabrication and analysis [J].

Barwicz, T ;

Popovic, MA ;

Rakich, PT ;

Watts, MR ;

Haus, HA ;

Ippen, EP ;

Smith, HI .

OPTICS EXPRESS, 2004, 12 (07) :1437-1442

[2] Wavelength switching and routing using absorption and resonance [J].

Little, BE ;

Haus, HA ;

Foresi, JS ;

Kimerling, LC ;

Ippen, EP ;

Ripin, DJ .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1998, 10 (06) :816-818

[3]

LITTLE BE, 1999, COMMUNICATION

[4]

NIELSON GN, 2004, THESIS MIT

[5]

POPOVIC MA, 2005, OPTICAL FIBER COMMUN

[6]

POPOVIC MA, UNPUB C LAS EL OPT C

[7] Device physics - The optical age of silicon [J].

Reed, GT .

NATURE, 2004, 427 (6975) :595-596

[8]

SENEVIRATNE D, 2004, Patent No. 10915220

[9]

Senturia S.D., 2002, MICROSYSTEM DESIGN

[10] SILICON-BASED OPTOELECTRONICS [J].

SOREF, RA .

PROCEEDINGS OF THE IEEE, 1993, 81 (12) :1687-1706

← 1 2 →