Island dynamics and the level set method for epitaxial growth

被引:67
作者
Caflisch, RE [1 ]
Gyure, MF
Merriman, B
Osher, SJ
Ratsch, C
Vvedensky, DD
Zinck, JJ
机构
[1] Univ Calif Los Angeles, Dept Math, Los Angeles, CA 90095 USA
[2] HRL Labs, Malibu, CA 90265 USA
[3] Univ Calif Los Angeles, Dept Math, Malibu, CA 90265 USA
[4] Univ London Imperial Coll Sci Technol & Med, Blackett Lab, London SW7 2BZ, England
关键词
epitaxy; level set method; island dynamics; thin films;
D O I
10.1016/S0893-9659(99)00026-9
中图分类号
O29 [应用数学];
学科分类号
070104 ;
摘要
We adapt the level set method to simulate the growth of thin films described by the motion of island boundaries. This island dynamics model involves a continuum in the lateral directions, but retains atomic scale discreteness in the growth direction. Several choices for the island boundary velocity are discussed, and computations of the island dynamics model using the level set method are presented. (C) 1999 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:13 / 22
页数:10
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