Electrical levitation for micromotors, microgyroscopes and microaccelerometers

Electrical levitation is an excellent candidate method for solving the problem of surface-contact friction resulting from the instability of rotors in micromotors. One of the most important aspects of electrical levitation is the achievement of stable equilibrium suspension. The theories and experiments in previous work are not sufficient for practical application of electrical levitation in microelectromechanical systems (MEMS). In particular, there are unrestrained rotatable disc structures in these devices. In this paper, the developed stable conditions of electrical levitation using three independent resonant circuits are presented, and the experimental procedure related to it is described. Finally, the application of electrical levitation in micromotors, electrostatic microgyroscopes and microaccelerometers is examined.