Deep hydrogen traps in heavily B-doped diamond

被引:40
作者
Goss, JP [1 ]
Briddon, PR
Jones, R
Teukam, Z
Ballutaud, D
Jomard, F
Chevallier, J
Bernard, M
Deneuville, A
机构
[1] Univ Newcastle Upon Tyne, Sch Nat Sci, Newcastle Upon Tyne NE1 7RU, Tyne & Wear, England
[2] Univ Exeter, Sch Phys, Exeter EX4 4QL, Devon, England
[3] Lab Phys Solides & Cristallogenese, CNRS, UMR 8635, F-92195 Meudon, France
[4] CNRS, Etud Proprietes Elect Solides Lab, F-38042 Grenoble, France
来源
PHYSICAL REVIEW B | 2003年 / 68卷 / 23期
关键词
D O I
10.1103/PhysRevB.68.235209
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Exposure of heavily B-doped (2x10(19)-4x10(20) cm(-3)) diamond to a deuterium plasma results in the formation of passive B-D complexes which are bound with a dissociation barrier of 2.5 eV. In heavily doped material there is evidence that deeper deuterium traps exist. Using first-principles methods we show that nearest-neighbor boron pairs are bound and can efficiently trap deuterium. The calculated binding energy for the B-D pair is in good agreement with experimentally obtained values. The comparison of the measured deuterium and boron concentrations with the model suggest that boron dimers are deeper deuterium traps, but complementary infrared or Raman measurements are needed to draw absolute conclusions regarding the formation of B2D or B2D2 complexes.
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页数:10
相关论文
共 44 条
[1]   Identification of boron clusters and boron-interstitial clusters in silicon [J].
Adey, J ;
Goss, JP ;
Jones, R ;
Briddon, PR .
PHYSICAL REVIEW B, 2003, 67 (24)
[2]   PSEUDOPOTENTIALS THAT WORK - FROM H TO PU [J].
BACHELET, GB ;
HAMANN, DR ;
SCHLUTER, M .
PHYSICAL REVIEW B, 1982, 26 (08) :4199-4228
[3]   Diffusion and thermal stability of hydrogen in homoepitaxial CVD diamond films [J].
Ballutaud, D ;
Jomard, F ;
Le Duigou, J ;
Theys, B ;
Chevallier, J ;
Deneuville, A ;
Pruvost, F .
DIAMOND AND RELATED MATERIALS, 2000, 9 (3-6) :1171-1174
[4]   ALIGNED DEFECT COMPLEX CONTAINING CARBON AND HYDROGEN IN AS-GROWN GAAS EPITAXIAL LAYERS [J].
CHENG, Y ;
STAVOLA, M ;
ABERNATHY, CR ;
PEARTON, SJ ;
HOBSON, WS .
PHYSICAL REVIEW B, 1994, 49 (04) :2469-2476
[5]   Hydrogen-boron interactions in p-type diamond [J].
Chevallier, J ;
Theys, B ;
Lusson, A ;
Grattepain, C ;
Deneuville, A ;
Gheeraert, E .
PHYSICAL REVIEW B, 1998, 58 (12) :7966-7969
[6]   Hydrogen-acceptor interactions in diamond [J].
Chevallier, J ;
Lusson, A ;
Ballutaud, D ;
Theys, B ;
Jomard, F ;
Deneuville, A ;
Bernard, M ;
Gheeraert, E ;
Bustarret, E .
DIAMOND AND RELATED MATERIALS, 2001, 10 (3-7) :399-404
[7]  
Chevallier J, 1999, PHYS STATUS SOLIDI A, V174, P73, DOI 10.1002/(SICI)1521-396X(199907)174:1<73::AID-PSSA73>3.0.CO
[8]  
2-5
[9]   Oxygen and dioxygen centers in Si and Ge:: Density-functional calculations [J].
Coutinho, J ;
Jones, R ;
Briddon, PR ;
Öberg, S .
PHYSICAL REVIEW B, 2000, 62 (16) :10824-10840
[10]   ALIGNED CARBON-HYDROGEN COMPLEXES IN GAAS FORMED BY THE DECOMPOSITION OF TRIMETHYLGALLIUM DURING LOW-PRESSURE METAL-ORGANIC VAPOR-PHASE EPITAXY [J].
DAVIDSON, BR ;
NEWMAN, RC ;
BACHEM, KH .
PHYSICAL REVIEW B, 1995, 52 (07) :5179-5182