Tribological fundamentals of polycrystalline diamond films

被引：68

作者：

Gardos, MN ^{[1
]}

机构：

[1] Raytheon Syst Co, Sensors & Elect Syst, El Segundo, CA 90245 USA

来源：

SURFACE & COATINGS TECHNOLOGY | 1999年 / 113卷 / 03期

关键词：

chemisorption; crystallographic texture; dangling bonds; friction; polycrystalline diamond; SEM tribometry; silicon; thermo- and tribocatalysis; wear;

D O I：

10.1016/S0257-8972(98)00842-1

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A decade's worth of SEM-tribometric work on polycrystalline diamond films is reviewed. Diamond-coated Si and SiC specimens have been tested under oscillatory sliding, at temperatures from room ambient to 1000 degrees C in (a) similar to 1.33x10(-3) Pa (similar to 1 x 10(-5) Torr) vacuum, (b) 13-39 Pa (0.1-0.3 Torr) partial pressures of hydrogen and (c) 26 Pa (0.2 Torr) partial pressure of oxygen. The temperature- and atmosphere-controlled tribological behavior of the films is interpreted by the environment-dependent values and trends of the average coefficient of friction. Accurate interpretation of the results is assisted by similar friction and wear data on various silicon crystallinities, complemented by applicable thermal desorption, surface chemical and tribometric data taken from the literature. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：183 / 200

页数：18

共 56 条

[51]

Stievenard D, 1998, APPL PHYS LETT, V72, P569, DOI 10.1063/1.120762

[52] TUNNELING SPECTROSCOPY OF ULTRATHIN OXIDE ON SI STRUCTURE AND H-TERMINATED SI SURFACES [J].

TABE, M ;

TANIMOTO, M .

APPLIED PHYSICS LETTERS, 1991, 58 (19) :2105-2107

[53] SI BAND-GAP SHRINKAGE CAUSED BY LOCAL STRAIN AT SI/SIO2 EDGE [J].

TAKEUCHI, K ;

AOKI, M .

APPLIED PHYSICS LETTERS, 1992, 61 (21) :2566-2568

[54] The identification of oxygen functional groups in carbonaceous materials by oxygen K-edge XANES [J].

Turner, JA ;

Thomas, KM ;

Russell, AE .

CARBON, 1997, 35 (07) :983-992

[55] Atomic-scale friction on diamond(111) studied by ultra-high vacuum atomic force microscopy [J].

vandenOetelaar, RJA ;

Flipse, CFJ .

SURFACE SCIENCE, 1997, 384 (1-3) :L828-L835

[56] CHEMISTRY OF HYDROGEN ON DIAMOND (100) [J].

YANG, YL ;

STRUCK, LM ;

SUTCU, LF ;

DEVELYN, MP .

THIN SOLID FILMS, 1993, 225 (1-2) :203-211

← 1 2 3 4 5 6 →