Corrugated silicon nitride membranes as suspensions in micromachined silicon accelerometers

被引：20

作者：

Lapadatu, D ^{[1
]}

Pyka, A ^{[1
]}

Dziuban, J ^{[1
]}

Puers, R ^{[1
]}

机构：

[1] WROCLAW TECH UNIV,INST ELECTRO TECH,PL-50372 WROCLAW,POLAND

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1996年 / 6卷 / 01期

关键词：

D O I：

10.1088/0960-1317/6/1/016

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents some theoretical considerations and experimental results carried out to investigate the potential use of corrugated silicon nitride membranes as a mechanical suspension in micromachined silicon capacitive accelerometers.

引用

页码：73 / 76

页数：4