A micromachined system for the separation of molecules using thermal field-flow fractionation method

被引:10
作者
Bargiel, S [1 ]
Górecka-Drzazga, A [1 ]
Dziuban, JA [1 ]
机构
[1] Univ Wroclaw, Fac Microsyst Elect & Photon, PL-50372 Wroclaw, Poland
关键词
silicon micromachining; microsystem; thermal field-flow fractionation; TFFF; separation; conductivity detector;
D O I
10.1016/j.sna.2003.09.033
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
All silicon-glass micromachined thermal field-flow fractionation (TFFF) microsystem has been developed and presented for the first time. The device consists of seven layers of double side, deep, selectively etched silicon and glass substrates, bonded anodically. The built-in fluidic heater and cooler allows producing the high thermal gradient. In the 30 mum deep, 2 mm wide and 50 mm long separation channel, the temperature gradient 1.5 x 10(6) K/m, has been obtained for relatively low heating agent temperature (similar to343 K). The TFFF microsystem has been equipped with two integrated, three-electrodes conductivity detectors. Some basic separation properties have been evaluated for low concentrated KCl test samples in water. It has been found that retention time of 0.6 mul sample of 0.01 M KCl in water, for 293/321 K (cooling/heating agents) compared to 0.9 X 10(6) K/m, is almost two times longer than it has been obtained in the device during the absence of the temperature gradient. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码:328 / 335
页数:8
相关论文
共 9 条
[1]   CHARACTERIZATION OF THE ELECTROSTATIC BONDING OF SILICON AND PYREX GLASS [J].
COZMA, A ;
PUERS, B .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1995, 5 (02) :98-102
[2]  
DZIUBAN J, 1998, P INT IMAPS C ZAK PO
[3]  
DZIUBAN J, 1997, P 21 C INT SOC HYB M, P111
[4]   A microfabricated thermal field-flow fractionation system [J].
Edwards, TL ;
Gale, BK ;
Frazier, AB .
ANALYTICAL CHEMISTRY, 2002, 74 (06) :1211-1216
[5]  
EDWARDS TL, 1999, P INT C SOL STAT SEN
[6]  
GORECKADRZAZGA A, 2002, P 7 OPT EL SENS C CO
[7]   ANODIC BONDING OF SILICON TO SILICON-WAFERS COATED WITH ALUMINUM, SILICON-OXIDE, POLYSILICON OR SILICON-NITRIDE [J].
NESE, M ;
HANNEBORG, A .
SENSORS AND ACTUATORS A-PHYSICAL, 1993, 37-8 :61-67
[8]   THERMAL-DIFFUSION IN LIQUID-MIXTURES AND ITS EFFECT ON POLYMER RETENTION IN THERMAL FIELD-FLOW FRACTIONATION [J].
RUE, CA ;
SCHIMPF, ME .
ANALYTICAL CHEMISTRY, 1994, 66 (22) :4054-4062
[9]   EFFECTS OF SOLVENT COMPOSITION ON POLYMER RETENTION IN THERMAL FIELD-FLOW FRACTIONATION - RETENTION ENHANCEMENT IN BINARY SOLVENT MIXTURES [J].
SISSON, RM ;
GIDDINGS, JC .
ANALYTICAL CHEMISTRY, 1994, 66 (22) :4043-4053