Replication qualities and optical properties of UV-moulded microlens arrays

被引:49
作者
Kim, SM [1 ]
Kang, SN [1 ]
机构
[1] Yonsei Univ, Sch Mech Engn, Seodaemoon Ku, Seoul, South Korea
关键词
D O I
10.1088/0022-3727/36/20/005
中图分类号
O59 [应用物理学];
学科分类号
摘要
UV-moulded microlens arrays with high replication quality were fabricated using a parametric design method. It is important to maximize replication quality because one can obtain replicated micro-optical components with desired properties by accurate control of the shape. In this study, nickel mould inserts for microlens arrays with lenses having diameters between 3 and 230 Am were fabricated by an electroforming process. The reflow method was used to make the master for the metallic mould insert. A UV-moulding system was designed and constructed, and the effects of compression pressure and UV-curing dose on the replication quality of UV-moulded microlens arrays with a diameter of 14 mum were examined experimentally. Finally, geometrical and optical properties of the replicated microlens arrays were measured and analysed.
引用
收藏
页码:2451 / 2456
页数:6
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