Fabrication of a microlens array using micro-compression molding with an electroformed mold insert

被引：102

作者：

Moon, SD

Lee, N

Kang, S

机构：

[1] Yonsei Univ, Sch Mech Engn, Seodaemoon Ku, Seoul 120749, South Korea

[2] Yonsei Univ, Ctr Informat Storage Device, Seodaemoon Ku, Seoul 120749, South Korea

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2003年 / 13卷 / 01期

关键词：

D O I：

10.1088/0960-1317/13/1/314

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Polymeric microlens arrays, with a diameter of 36-96 mum, a radius of curvature of 20-60 mum and a pitch of 250 mum, were fabricated Using micro-compression molding with electroformed mold inserts. We used the reflow method and the electroforming process to make the mother and the metallic mold inserts, respectively. Micro-compression molding with powder polymer was developed to replicate microlenses. The surface profiles, imaging qualities, and surface roughness of the microlenses were measured and analyzed.

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页码：98 / 103

页数：6

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