Fabrication of polymeric microlens of hemispherical shape using micromolding

被引:31
作者
Moon, SD
Kang, SN
Bu, JU
机构
[1] Yonsei Univ, Sch Elect & Mech Engn, Seodaemoon Ku, Seoul, South Korea
[2] LG Elect Inst Technol, Device & Mat Lab, Seocho Ku, Seoul, South Korea
关键词
microlens; microcompression molding; PMMA; silicon mold insert;
D O I
10.1117/1.1497617
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Polymeric microlenses play an important role in reducing the size, weight, and cost of optical data storage and optical communication systems. We fabricate polymeric microlenses using the microcompression molding process. The design and fabrication procedures for mold insertion is simplified using silicon instead of metal. PMMA powder is used as the molding material. Governed by process parameters such as temperature and pressure histories, the micromolding process is controlled to minimize various defects that develop during the molding process. The radius of curvature and magnification ratio of fabricated microlens are measured as 150 mum and over 3.0, respectively. (C) 2002 Society of Photo-Optical Instrumentation Engineers.
引用
收藏
页码:2267 / 2270
页数:4
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