Nanoscale Characterization of Energy Generation from Piezoelectric Thin Films

被引:21
作者
Bhaskaran, Madhu [1 ,2 ]
Sriram, Sharath [1 ,2 ]
Ruffell, Simon [3 ]
Mitchell, Arnan [1 ,2 ]
机构
[1] RMIT Univ, Sch Elect & Comp Engn, Microplatforms Res Grp, Melbourne, Vic 3001, Australia
[2] RMIT Univ, Sch Elect & Comp Engn, Platform Technol Res Inst, Melbourne, Vic 3001, Australia
[3] Australian Natl Univ, Res Sch Phys & Engn, Dept Elect Mat Engn, Canberra, ACT 0200, Australia
基金
澳大利亚研究理事会;
关键词
NANOINDENTATION; NANOGENERATORS; ELECTRICITY; ORIENTATION; DRIVEN;
D O I
10.1002/adfm.201002663
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We report on the use of nanoindentation to characterize in situ the voltage and current generation of piezoelectric thin films. This work presents the controlled observation of nanoscale piezoelectric voltage and current generation, allowing accurate quantification and mapping of force function variations. We characterize both continuous thin films and lithographically patterned nanoislands with constrained interaction area. The influence of size on energy generation parameters is reported, demonstrating that nanoislands can exhibit more effective current generation than continuous films. This quantitative finding suggests that further research into the impact of nanoscale patterning of piezoelectric thin films may yield an improved materials platform for integrated microscale energy scavenging systems.
引用
收藏
页码:2251 / 2257
页数:7
相关论文
共 23 条
[1]   Stress-induced depolarization of (Pb, La)TiO3 ferroelectric thin films by nanoindentation [J].
Algueró, M ;
Bushby, AJ ;
Reece, MJ ;
Poyato, R ;
Ricote, J ;
Calzada, ML ;
Pardo, L .
APPLIED PHYSICS LETTERS, 2001, 79 (23) :3830-3832
[2]   Effect of multi-layered bottom electrodes on the orientation of strontium-doped lead zirconate titanate thin films [J].
Bhaskaran, M. ;
Sriram, S. ;
Mitchell, D. R. G. ;
Short, K. T. ;
Holland, A. S. .
THIN SOLID FILMS, 2008, 516 (22) :8101-8105
[3]   Strain effects in low-dimensional transition metal oxides [J].
Cao, Jinbo ;
Wu, Junqiao .
MATERIALS SCIENCE & ENGINEERING R-REPORTS, 2011, 71 (2-4) :35-52
[4]   Ferroelectric/ferroelastic behavior and piezoelectric response of lead zirconate titanate thin films under nanoindentation [J].
Koval, V ;
Reece, MJ ;
Bushby, AJ .
JOURNAL OF APPLIED PHYSICS, 2005, 97 (07)
[5]   Enhanced size-dependent piezoelectricity and elasticity in nanostructures due to the flexoelectric effect [J].
Majdoub, M. S. ;
Sharma, P. ;
Cagin, T. .
PHYSICAL REVIEW B, 2008, 77 (12)
[6]   Dramatic enhancement in energy harvesting for a narrow range of dimensions in piezoelectric nanostructures [J].
Majdoub, M. S. ;
Sharma, P. ;
Cagin, T. .
PHYSICAL REVIEW B, 2008, 78 (12)
[7]   Piezoelectric nanoindentation [J].
Rar, A ;
Pharr, GM ;
Oliver, WC ;
Karapetian, E ;
Kalinin, SV .
JOURNAL OF MATERIALS RESEARCH, 2006, 21 (03) :552-556
[8]  
Roundy SJ., 2003, ENERGY SCAVENGING WI
[9]   Identification of nanoindentation-induced phase changes in silicon by in situ electrical characterization [J].
Ruffell, S. ;
Bradby, J. E. ;
Fujisawa, N. ;
Williams, J. S. .
JOURNAL OF APPLIED PHYSICS, 2007, 101 (08)
[10]   An in situ electrical measurement technique via a conducting diamond tip for nanoindentation in silicon [J].
Ruffell, S. ;
Bradby, J. E. ;
Williams, J. S. ;
Warren, O. L. .
JOURNAL OF MATERIALS RESEARCH, 2007, 22 (03) :578-586