Nano- to microscale wear and mechanical characterization using scanning probe microscopy

被引:108
作者
Bhushan, B [1 ]
机构
[1] Ohio State Univ, Dept Mech Engn, Comp Microtribol & Contaminat Lab, Columbus, OH 43210 USA
关键词
atomic force microscopy; in situ deformation; wear; fracture;
D O I
10.1016/S0043-1648(01)00804-3
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Scanning probe microscopy (SPM) techniques, specifically so-called atomic force/friction force microscopy (AFM/FFM) are increasingly used for tribological studies of engineering surfaces at scales ranging from atomic and molecular to microscales. AFMs with suitable tips are being used to study microscratching, microwear and nanowear and nano/picoindentation behavior of solid surfaces and thin films. AFMs have also been used for nanofabrication/nanomachining purposes. Scratch and wear properties of a variety of materials have been measured. Mechanisms of material removal on the microscale are studied. Wear precursors can be detected at early stages of wear using localized surface potential measurements. Localized surface elasticity maps of composite materials with penetration depths of less than 100 nm can be obtained. Nanoindentation hardness and Young's modulus of elasticity can be measured with a depth of indentation as low as 1 nm. Scratching and indentation on the nanoscale are powerful ways to screen for adhesion and resistance to deformation of ultrathin coatings. These studies provide insight into failure mechanisms of materials and thin coatings. Finally, in situ surface characterization of local deformation of materials and thin coatings helps to develop better understanding of failure mechanisms. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1105 / 1123
页数:19
相关论文
共 82 条
[1]   SURFACE MODIFICATION WITH THE SCANNING TUNNELING MICROSCOPE [J].
ABRAHAM, DW ;
MAMIN, HJ ;
GANZ, E ;
CLARKE, J .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1986, 30 (05) :492-499
[2]   NANOMETER-SCALE HOLE FORMATION ON GRAPHITE USING A SCANNING TUNNELING MICROSCOPE [J].
ALBRECHT, TR ;
DOVEK, MM ;
KIRK, MD ;
LANG, CA ;
QUATE, CF ;
SMITH, DPE .
APPLIED PHYSICS LETTERS, 1989, 55 (17) :1727-1729
[3]   Measurements of elastic properties of ultra-thin diamond-like carbon coatings using atomic force acoustic microscopy [J].
Amelio, S ;
Goldade, AV ;
Rabe, U ;
Scherer, V ;
Bhushan, B ;
Arnold, W .
THIN SOLID FILMS, 2001, 392 (01) :75-84
[4]   Kelvin probe microscopy measurements of surface potential change under wear at low loads [J].
Bhushan, B ;
Goldade, AV .
WEAR, 2000, 244 (1-2) :104-117
[5]   Pole tip recession studies of hard carbon-coated thin-film tape heads [J].
Bhushan, B ;
Patton, ST ;
Sundaram, R ;
Dey, S .
JOURNAL OF APPLIED PHYSICS, 1996, 79 (08) :5916-5918
[6]   NANOINDENTATION HARDNESS MEASUREMENTS USING ATOMIC-FORCE MICROSCOPY [J].
BHUSHAN, B ;
KOINKAR, VN .
APPLIED PHYSICS LETTERS, 1994, 64 (13) :1653-1655
[7]   MICRO/NANOTRIBOLOGY AND ITS APPLICATIONS TO MAGNETIC STORAGE DEVICES AND MEMS [J].
BHUSHAN, B .
TRIBOLOGY INTERNATIONAL, 1995, 28 (02) :85-96
[8]   MICROTRIBOLOGY OF METAL-PARTICLE, BARIUM FERRITE AND METAL EVAPORATED MAGNETIC TAPES [J].
BHUSHAN, B ;
KOINKAR, VN .
WEAR, 1995, 181 :360-370
[9]   TRIBOLOGICAL STUDIES OF SILICON FOR MAGNETIC RECORDING APPLICATIONS [J].
BHUSHAN, B ;
KOINKAR, VN .
JOURNAL OF APPLIED PHYSICS, 1994, 75 (10) :5741-5746
[10]  
BHUSHAN B, 1995, WEAR, V181, P743