Precision positioning using a microfabricated electrostatic actuator

被引：65

作者：

Horsley, DA ^{[1
]}

Wongkomet, N ^{[1
]}

Horowitz, R ^{[1
]}

Pisano, AP ^{[1
]}

机构：

[1] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1999年 / 35卷 / 02期

关键词：

actuator; disk drive; micro-electromechanical systems; position control;

D O I：

10.1109/20.753822

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a microfabricated actuator designed for high precision servo-positioning in a magnetic hard disk drive. The device is actuated using electrostatic force generated with parallel-plate capacitive electrodes. The displacement of these electrodes is measured using a dedicated capacitive sensing interface, allowing closed-loop control to be used to extend the servo bandwidth. Using the sensing electronics and a simple phase-lead compensator, a prototype device was used to actuate a 1.6 mg ceramic slider over a 1.2 kHz bandwidth. Using optical position measurements, the same actuator was used to achieve a 2.5 kHz bandwidth.

引用

页码：993 / 999

页数：7

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