Comparison of an atmospheric pressure, radio-frequency discharge operating in the α and γ modes

被引:117
作者
Yang, X
Moravej, M
Nowling, GR
Babayan, SE
Panelon, J
Chang, JP
Hicks, RF [1 ]
机构
[1] Univ Calif Los Angeles, Dept Chem Engn, Los Angeles, CA 90095 USA
[2] Surfx Technol LLC, Culver City, CA 90232 USA
关键词
D O I
10.1088/0963-0252/14/2/013
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The alpha and gamma modes of an atmospheric pressure, radio-frequency plasma have been investigated. The plasma source consisted of two parallel electrodes that were fed with helium and 0.4 vol% nitrogen. The transition from alpha to gamma was accompanied by a 40% drop in voltage, a 12% decrease in current and a surge in power density from 25 to 2083 W cm(-3). Optical emission confirmed that sheath breakdown occurred at the transition point. The maximum light intensity shifted from a position 0.25 mm above the electrodes to right against the metal surfaces. The average density of ground-state nitrogen atoms produced in the atmospheric plasma was determined from the temporal decay of N-2(B) emission in the afterglow. It was found that 5.2% and 15.2% of the N-2 fed were dissociated into atoms when the plasma was operated in the alpha and gamma modes, respectively. The lower efficiency of the gamma discharge may be attributed to the non-uniform distribution of the discharge between the electrodes.
引用
收藏
页码:314 / 320
页数:7
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