Characterization of the active species in the afterglow of a nitrogen and helium atmospheric-pressure plasma

被引:49
作者
Babayan, SE [1 ]
Ding, G [1 ]
Nowling, GR [1 ]
Yang, X [1 ]
Hicks, RF [1 ]
机构
[1] Univ Calif Los Angeles, Dept Chem Engn, Los Angeles, CA 90095 USA
基金
美国国家科学基金会;
关键词
atomic nitrogen; nitrogen plasma; atmospheric pressure plasma;
D O I
10.1023/A:1014847526292
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
The concentrations of the neutral active species in the afterglow of a nitrogen and helium atmospheric-pressure plasma have been determined by optical emission and absorption spectroscopy and by numerical modeling. For operation with 10 Torr N-2 and 750 Torr He, at 15.5 W/cm(3) rf power, 30.4 L/min flow rate, and a neutral temperature of 50degreesC, the plasma produced 4.8 x 10(15) cm(-3) of ground state nitrogen atoms, N(S-4), 2.1 x 10(13) cm(-3) of N-2(A (3)Sigma(u)), 1.2 x 10(12) cm(-3) of N-2(B (3)Pi(g)), and 3.2 x 10(9) cm(-3) of N-2(C (3)Pi(u)). The concentration of nitrogen atoms and metastable state nitrogen molecules, N-2(A), increased gradually, with the rf power and the nitrogen partial pressure. Both the model and experiments indicate that ground-state nitrogen atoms are the dominant active species in the afterglow beyond 2.0 ms.
引用
收藏
页码:255 / 269
页数:15
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