A novel DC magnetron sputtering facility for space research and synchrotron radiation optics

被引：1

作者：

Hussain, AM ^{[1
]}

Christensen, FE ^{[1
]}

Pareschi, G ^{[1
]}

Poulsen, HF ^{[1
]}

机构：

[1] Danish Space Res Inst, DK-2100 Copenhagen, Denmark

来源：

X-RAY OPTICS, INSTRUMENTS, AND MISSIONS | 1998年 / 3444卷

关键词：

DC-magnetron sputtering; multilayer mirrors; X-ray telescopes; X-ray optics; vacuum technology;

D O I：

10.1117/12.331292

中图分类号：

P1 [天文学];

学科分类号：

0704 ;

摘要：

A new DC magnetron sputtering facility has been build up at the Danish Space Research Institute (DSRI), specially designed to enable uniform coatings of large area curved optics, such as Wolter-I mirror optics used in space telescopes and curved optics used in synchrotron radiation facilities. The paper is a brief description of this new facility and the future applications.

引用

页码：443 / 450

页数：8

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