Detection of dilute nitrogen dioxide and thickness effect of tungsten oxide thin film sensors

被引：74

作者：

Tamaki, J ^{[1
]}

Hayashi, A ^{[1
]}

Yamamoto, Y ^{[1
]}

Matsuoka, M ^{[1
]}

机构：

[1] Ritsumeikan Univ, Fac Sci & Engn, Dept Appl Chem, Shiga 5258577, Japan

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2003年 / 95卷 / 1-3期

关键词：

tungsten oxide; nitrogen dioxide gas sensor; thin film; thickness effect;

D O I：

10.1016/S0925-4005(03)00417-9

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

WO3 thin film sensors have been fabricated by suspension dropping on SiO2/Si substrate equipped with An microelectrodes, and subjected to the detection of dilute NO2 less than ppm level. The WO3 thin film with the thickness of ca. 0.6 mum showed the extremely high sensitivity to dilute NO2 at 200 degreesC (for example, S = 9.4 to 0.2 ppm NO2). The Au electrodes were visible for the thin film of 0.6 mum, inducing the easy access of NO, molecules to a part between electrodes. Moreover, the high sensitivity suggests the possibility of environmental monitoring using WO3 thin film sensors. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：111 / 115

页数：5

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