Contact improvement of carbon nanotubes via electroless nickel deposition

被引:51
作者
Liebau, M [1 ]
Unger, E [1 ]
Duesberg, GS [1 ]
Graham, AP [1 ]
Seidel, R [1 ]
Kreupl, F [1 ]
Hoenlein, W [1 ]
机构
[1] Infineon Technol AG, CPR Nano Proc, D-81739 Munich, Germany
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2003年 / 77卷 / 06期
关键词
Nickel; Cobalt; Carbon Nanotubes; Palladium; Contact Resistance;
D O I
10.1007/s00339-003-2207-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Individual multi-walled carbon nanotubes (CNTs) were deposited onto microelectrodes and embedded in nickel to achieve low-ohmic contact resistances. Electroless deposition of nickel onto gold/iron, palladium, and cobalt microelectrodes was used to form electrically stable bonds at the interfaces between the electrodes and CNTs. Resistance measurements showed that the contact resistances of the CNTs on gold/iron and palladium were significantly improved by nickel embedding, whereas no further improvement was found for the CNTs on cobalt. Electroless metal deposition is a parallel process providing stable electrical and mechanical contacts between CNTs and metallic microelectrodes.
引用
收藏
页码:731 / 734
页数:4
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