Magnetic bistable micro-actuator with integrated permanent magnets

被引：29

作者：

Dieppedale, C ^{[1
]}

Desloges, B ^{[1
]}

Rostaing, H ^{[1
]}

Delamare, J ^{[1
]}

Cugat, O ^{[1
]}

Meunier-Carus, J ^{[1
]}

机构：

[1] CEA, LETI, F-38054 Grenoble, France

来源：

PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3 | 2004年

关键词：

magnetic actuator; permanent magnet; electroplating;

D O I：

10.1109/ICSENS.2004.1426208

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A new magnetic micro-actuator with integrated permanent magnets has been developed. The design of this device with a levitating mobile magnet is a real innovation and is patented. The structure was modeled using analytical and numerical calculations. Furthermore, the fabrication feasibility, using collective micro-technology processes, has recently been demonstrated.

引用

页码：493 / 496

页数：4