Morphological features of diamond films depending on substrate temperatures via a low pressure polymer precursor process in a hot filament reactor

被引：11

作者：

Sun, Z ^{[1
]}

Shi, X

Wang, X

Tay, BK

Yang, H

Sun, Y

机构：

[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Nanyang 639798, Singapore

[2] Univ Massachusetts, Dept Chem, N Dartmouth, MA USA

来源：

关键词：

diamond films; crystal growth; morphology; temperature;

D O I：

10.1016/S0925-9635(97)00330-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond films were synthesized at low pressure using phenylcarbyne polymer as a precursor in a hot filament reactor. The morphological features of diamond films at different substrate temperatures were investigated by scanning electron microscopy (SEM). Various diamonds, such as microcrystals, flake-like crystals and whiskers were observed. The variation mainly depends on the substrate temperature. (C) 1998 Elsevier Science S.A.

引用

页码：939 / 943

页数：5

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