Diamond-coated cantilevers for scanning capacitance microscopy applications

被引：3

作者：

Yabuhara, H

Ciappa, M

Fichtner, W

机构：

[1] Toshiba Co Ltd, Corp Mfg Ctr, Isogo Ku, Yokohama, Kanagawa 2350017, Japan

[2] Swiss Fed Inst Technol, Integrated Syst Lab, CH-8092 Zurich, Switzerland

来源：

MICROELECTRONICS RELIABILITY | 2001年 / 41卷 / 9-10期

关键词：

D O I：

10.1016/S0026-2714(01)00190-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Diamond-coated cantilevers have been used for Scanning Capacitance Microscopy as an alternative for metal-coated ones in order to improve the stability of probes. It is shown that the diamond-coated probes produce adequate intensity of dC signal and high contrast for both P-type and N-type silicon samples and also provide excellent endurance characteristics. Due to this robustness of the diamond-coated probes, we are able to evaluate the reproducibility of measurements and the large-area homogeneity of the ultra-thin oxide for both dry and wet oxidation. (C) 2001 Elsevier Science Ltd. All rights reserved.

引用

页码：1459 / 1463

页数：5

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