Microfabricated transition-edge x-ray detectors

被引：72

作者：

Hilton, GC

Martinis, JM

Irwin, KD

Bergren, NF

Wollman, DA

Huber, ME

Deiker, S

Nam, SW

机构：

[1] Natl Inst Stand & Technol, Boulder, CO 80303 USA

[2] Univ Colorado, Dept Phys, Denver, CO 80217 USA

来源：

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 2001年 / 11卷 / 01期

关键词：

x-ray detectors; IR detectors; microcalorimeter; x-ray spectrometry;

D O I：

10.1109/77.919451

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We are developing high performance x-ray detectors based on superconducting transition-edge sensors (TES) for application in materials analysis and astronomy. Using our recently developed fully lithographic TES fabrication process, we have made devices with an energy resolution of 4.5 +/- 0.1 eV for 5.9 keV x-rays, the best reported energy resolution for any energy dispersive detectors in this energy range. These detectors utilize micromachined thermal isolation structures and transition-edge sensors fabricated from Mo/Cu bilayers with normal-metal boundary conditions. We have found the normal-metal boundary conditions to be critical to stable and reproducible low noise operation. In this paper we present details of fabrication and performance of these devices.

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页码：739 / 742

页数：4

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