A new facile route for the preparation of single-source precursors for bulk, thin-film, and nanocrystallite I-III-VI semiconductors

被引:96
作者
Banger, KK
Jin, MHC
Harris, JD
Fanwick, PE
Hepp, AF
机构
[1] Ohio Aerosp Inst, Cleveland, OH 44142 USA
[2] Ind Technol Inst, Ctr Thin Film & Nanotechnol, Cleveland, OH 44115 USA
[3] Purdue Univ, Xray Facil, W Lafayette, IN 47907 USA
[4] NASA, Glenn Res Ctr Lewis Field, Cleveland, OH 44135 USA
关键词
D O I
10.1021/ic034802h
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
We report a new simplified synthetic procedure for commercial manufacture of ternary single-source precursors (SSPs). This new synthetic process has been successfully implemented to fabricate known SSPs on bulk scale and the first liquid SSPs to the semiconductors CuInSe2 and AgInxSy. Single crystal X-ray determination reveals the first unsolvated ternary AgInS SSP. SSPs prepared via this new route have successfully been used in a spray assisted chemical vapor deposition (CVD) process to deposit polycrystalline thin films, and for preparing ternary nanocrystallites.
引用
收藏
页码:7713 / 7715
页数:3
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