Electrical conductivity in Li-Si-P-O-N oxynitride thin-films

被引：51

作者：

Lee, SJ

Bae, JH

Lee, HW

Baik, HK

Lee, SM ^{[1
]}

机构：

[1] Kangweon Natl Univ, Dept Adv Mat Sci & Engn, Chunchon 200701, South Korea

[2] Yonsei Univ, Dept Met Engn, Seoul 120749, South Korea

来源：

JOURNAL OF POWER SOURCES | 2003年 / 123卷 / 01期

关键词：

solid-state electrolyte; thin-film electrolytes; lithium microbattery; ion conductivity;

D O I：

10.1016/S0378-7753(03)00457-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Nitrogen-incorporated lithium silicophosphate (LiSiPON) thin-film electrolytes, which contain two glass-forming elements, are fabricated by sputtering from a (1 - x)Li3PO4.xLi(2)SiO(3) target in a nitrogen reactive plasma. The results of impedance measurements show that the activation energy for conduction decreases as the Si content increases, which leads to an increase in the ionic conductivity of the films. It is suggested that these improvements in the electrical properties of the films are due to the combined effect of the mixed former and nitrogen incorporation. It appears that the decomposition potential of the electrolyte film in contact with Pt is about 5.5 V. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：61 / 64

页数：4

共 11 条

[1] ELECTRICAL-PROPERTIES OF AMORPHOUS LITHIUM ELECTROLYTE THIN-FILMS [J].