ZnO extended-gate field-effect transistors as pH sensors -: art. no. 143508

被引:179
作者
Batista, PD [1 ]
Mulato, M [1 ]
机构
[1] Univ Sao Paulo, FFCLRP, Dept Fis & Matemat, BR-14040901 Ribeirao Preto, SP, Brazil
基金
巴西圣保罗研究基金会;
关键词
D O I
10.1063/1.2084319
中图分类号
O59 [应用物理学];
学科分类号
摘要
The objective of this work is the study and characterization of zinc oxide (ZnO) as pH sensor. We used an extended-gate field-effect transistor (EGFET) to obtain the response of ZnO as a function of pH. Sol-gel was used for the production of ZnO films because this is a low cost and easy fabrication procedure. The ZnO powder was obtained at different temperatures of calcination, from 150 up to 500 degrees C. The samples were investigated by x-ray diffraction, infrared spectroscopy, thermogravimetric analysis and differential thermal analysis. The films were investigated as pH sensors (range 2-12) and the ZnO EGFET shows a sensitivity of 38 mV/pH. (C) 2005 American Institute of Physics.
引用
收藏
页码:1 / 3
页数:3
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