Combination of single crystal zeolites and microfabrication: Two applications towards zeolite nanodevices

被引:38
作者
Scandella, L [1 ]
Binder, G
Mezzacasa, T
Gobrecht, J
Berger, R
Lang, HP
Gerber, C
Gimzewski, JK
Koegler, JH
Jansen, JC
机构
[1] Paul Scherrer Inst, Lab Micro & Nanostruct, CH-5232 Villigen, Switzerland
[2] IBM Corp, Zurich Res Lab, Div Res, CH-8803 Ruschlikon, Switzerland
[3] Univ Basel, Inst Phys, CH-4056 Basel, Switzerland
[4] Delft Univ Technol, Dept Organ Chem & Catalysis, NL-2628 BL Delft, Netherlands
关键词
zeolite devices; cantilever sensors; micromechanical devices;
D O I
10.1016/S1387-1811(98)00021-3
中图分类号
O69 [应用化学];
学科分类号
081704 ;
摘要
We present two novel approaches to using zeolite crystals for 'nanodevices'. First, single crystal zeolites have been aligned within the grooves of micromachined silicon wafers for a three-dimensional ordering of dye molecules (p-nitroaniline). The orientation of p-nitroaniline molecules absorbed within the channel system of the aligned zeolites by steric constraints provides an opportunity to study the optical properties of the composite. Second, zeolites with their high surface-to-mass ratio and selectivity are ideal materials to enhance the sensitivity of micron scale sensor devices to loading. As an example, experimental data on humidity sensing using a few single crystal zeolites attached to a cantilever sensor is presented. (C) 1998 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:403 / 409
页数:7
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