Simulation, dynamic testing and design of micromachined flexible joints

被引：15

作者：

Fettig, H ^{[1
]}

Wylde, J

Hubbard, T

Kujath, M

机构：

[1] Dalhousie Univ, Dept Mech Engn, Halifax, NS B3J 1B6, Canada

[2] Nortel Networks, High Performance Opt Component Solut, Nepean, ON K2H 8E9, Canada

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2001年 / 11卷 / 03期

关键词：

D O I：

10.1088/0960-1317/11/3/308

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper examines the simulation, dynamic testing and design of micromachined flexible joints. The objective is to mimic the kinematics of classical macro rotating and sliding joints with flexural micro joints. The joints consist of long slender beams that are folded in a variety of shapes: 'I', 'H', 'X', 'S', 'U' and 'V' shaped joints are considered. Finite element modelling simulations are used to simulate rotational, axial and out-of-plane stiffness and examine the effect of variations in joint length and beam angles. The simulation results are compared to a series of dynamic tests of polysilicon micromachined joints. The resonant frequencies of joint-mass systems were measured using a non-contact laser reflectance apparatus and the derived experimental rotational stiffnesses were found to agree with simulations. Design guidelines for the selection of the optimum joint shape and length for given functional requirements such as directional stiffness, selective compliance and range of motion are presented.

引用

页码：209 / 216

页数：8

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