Mechanical stresses upon crystallization in phase change materials

被引:142
作者
Pedersen, TPL
Kalb, J
Njoroge, WK
Wamwangi, D
Wuttig, M [1 ]
Spaepen, F
机构
[1] Rhein Westfal TH Aachen, Inst Phys 1, D-52056 Aachen, Germany
[2] Harvard Univ, Div Engn & Appl Sci, Cambridge, MA 02138 USA
关键词
D O I
10.1063/1.1415419
中图分类号
O59 [应用物理学];
学科分类号
摘要
Crystallization processes in different Te alloys, employed in phase change materials for optical data storage, have been investigated by in situ mechanical stress measurements. Upon crystallization a considerable stress buildup is observed, which scales with the volume change upon crystallization. Nevertheless the observed stress change only corresponds to approximately 9% of the stress estimated for a purely elastic transformation. Further evidence of stress relief phenomena comes from the temperature dependence of the stress in the crystalline and amorphous states. Ultrathin dielectric layers have a profound influence on the crystallization process as evidenced by simultaneous optical reflectance and mechanical stress measurements. This observation can be explained by heterogeneous nucleation of crystallites at the interface between the dielectric layer and the phase change film. (C) 2001 American Institute of Physics.
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收藏
页码:3597 / 3599
页数:3
相关论文
共 13 条
[1]   REVERSIBILITY AND STABILITY OF TELLURIUM ALLOYS FOR OPTICAL-DATA STORAGE APPLICATIONS [J].
CHEN, M ;
RUBIN, KA ;
MARRELLO, V ;
GERBER, UG ;
JIPSON, VB .
APPLIED PHYSICS LETTERS, 1985, 46 (08) :734-736
[2]   Effect of ZnS adhesion layer on overwrite cyclability of phase change optical recording media [J].
Ebina, A ;
Hirasaka, M ;
Isemoto, J ;
Takase, A ;
Fujinawa, G ;
Sugiyama, I .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (3B) :1569-1574
[3]   Oxygen doping effect on Ge-Sb-Te phase change optical disks [J].
Ebina, A ;
Hirasaka, M ;
Nakatani, K .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1999, 17 (06) :3463-3466
[4]   Determination of elastic constants in thin films using hydrogen loading [J].
Laudahn, U ;
Fähler, S ;
Krebs, HU ;
Pundt, A ;
Bicker, M ;
Hülsen, UV ;
Geyer, U ;
Kirchheim, R .
APPLIED PHYSICS LETTERS, 1999, 74 (05) :647-649
[5]  
Libera M., 1990, MRS Bulletin, V15, P40
[6]   MECHANICAL-PROPERTIES OF THIN-FILMS [J].
NIX, WD .
METALLURGICAL TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1989, 20 (11) :2217-2245
[7]  
Okamine S., 1992, Proceedings of the SPIE - The International Society for Optical Engineering, V1663, P315, DOI 10.1117/12.137557
[8]   PROGRESS AND ISSUES OF PHASE-CHANGE ERASABLE OPTICAL-RECORDING MEDIA [J].
RUBIN, KA ;
CHEN, M .
THIN SOLID FILMS, 1989, 181 :129-139
[9]   High-density and high-data-transfer-rate optical disk with blue laser diode and Ag-In-Sb-Te phase-change material [J].
Shinotsuka, M ;
Onagi, N ;
Harigaya, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (2B) :976-977
[10]   A new super-resolution film applicable to read-only and rewritable optical disks [J].
Shintani, T ;
Terao, M ;
Yamamoto, H ;
Naito, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1999, 38 (3B) :1656-1660