Highly sensitive and fast-responding SnO2 sensor fabricated by combustion chemical vapor deposition

被引:308
作者
Liu, Y [1 ]
Koep, E [1 ]
Liu, ML [1 ]
机构
[1] Georgia Inst Technol, Sch Mat Sci & Engn, Ctr Innovat Fuel Cell & Biol Technol, Atlanta, GA 30332 USA
关键词
D O I
10.1021/cm050451o
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Highly porous and nanostructured SnO2 thin-film gas sensors with Pt interdigitated electrodes have been fabricated via a combustion chemical vapor deposition process. The SnO2 films were less than 1 mu m thick and consisted of nanocrystallines smaller than 30 nm. At 300 degrees C, the as-prepared SnO2 gas sensor showed a sensitivity of 1075 to 500 ppm ethanol vapor, and the corresponding response time and recovery time were 31 and 8 s, respectively. The extrapolated low detection limit appears to be below 1 ppm. Consequently, the as-fabricated sensor demonstrated significant improvements over those reported in the literature. These highly sensitive, fast-responding, and low-cost SnO2 sensors could have many practical applications.
引用
收藏
页码:3997 / 4000
页数:4
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