Monitoring and control of semiconductor manufacturing processes

被引：38

作者：

Limanond, S ^{[1
]}

Si, J ^{[1
]}

Tsakalis, K ^{[1
]}

机构：

[1] Arizona State Univ, Dept Elect Engn, SSERC, Tempe, AZ 85287 USA

来源：

IEEE CONTROL SYSTEMS MAGAZINE | 1998年 / 18卷 / 06期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1109/37.736011

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 [计算机科学与技术];

摘要：

[No abstract available]

引用

页码：46 / 58

页数：13

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