Magnetron sputtering of hard nanocomposite coatings and their properties

被引：210

作者：

Musil, J

Vlcek, J

机构：

[1] Univ W Bohemia, Dept Phys, Plzen 30614, Czech Republic

[2] Acad Sci Czech Republ, Inst Phys, Prague 18221 8, Czech Republic

来源：

SURFACE & COATINGS TECHNOLOGY | 2001年 / 142卷

关键词：

nanocomposite coatings; hardness; mechanical properties; friction; magnetron sputtering;

D O I：

10.1016/S0257-8972(01)01139-2

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The article reports on the present status of knowledge in the field of hard and superhard nanocomposite coatings prepared by magnetron sputtering. Special attention is devoted to the two-phase nanocomposites composed of one hard and one soft phase. Trends of the next development are outlined. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：557 / 566

页数：10

共 31 条

[1]

Barna P.B., 1997, PROTECTIVE COATINGS

[2]

KARVANKOVA P, 2000, THESIS U W BOHEMIA P

[3]

MAYRHOFER PH, 2000, ICMCTF 2000 APR 2000

[4] Composite TiN-Ni thin films deposited by reactive magnetron sputter ion-plating [J].