Refractive index measurements of thin films using both Brewster and m-line technique: A combined experimental setup

被引:19
作者
Schutzmann, S
Casalboni, M
De Matteis, F
Prosposito, P
机构
[1] Univ Roma Tor Vergata, Dipartimento Sci & Tecnol Chim, I-00133 Rome, Italy
[2] Univ Roma Tor Vergata, Ist Nazl Fis Mat, I-00133 Rome, Italy
[3] Univ Roma Tor Vergata, Dipartimento Fis, I-00133 Rome, Italy
[4] Univ Roma Tor Vergata, Ist Nazl Fis Mat, I-00133 Rome, Italy
[5] Univ Roma Tor Vergata, Dipartimento Fis, I-00133 Rome, Italy
[6] Univ Roma Tor Vergata, Ist Nazl Fis Mat, I-00133 Rome, Italy
关键词
D O I
10.1016/j.jnoncrysol.2005.04.022
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We report on refractive index measurements of guiding and non-guiding films synthesized by the sol-gel technique. An experimental setup has been developed in our laboratory based on both m-line and Brewster angle methods. The main feature of the setup is the ability to perform both m-line and Brewster angle measurements on the same sample allowing a more accurate measurement of the refractive index. Moreover, using laser sources at different wavelengths, we are able to measure refractive index as a function of wavelength in the visible and near infrared spectral range. We have tested our experimental setup performing measurements on many guiding and non-guiding sol-gel films deposited by the spin-coating technique on glass substrates. Estimation of refractive indices for non-absorbing thin films with an accuracy and reproducibility to within 0.1%, in a spectral region from 532 nm to 780 nm, has been achieved. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:1814 / 1818
页数:5
相关论文
共 14 条
[1]  
ABELES F, 1968, PROGR OPTICS
[2]   Interference method for determination of the refractive index and thickness [J].
Alexandrov, SA ;
Chernyh, IV .
OPTICAL ENGINEERING, 2000, 39 (09) :2480-2486
[3]  
AZZAM RMA, 1977, ELLIPOSMETRY POLARIZ
[4]  
Born M., 1999, PRINCIPLES OPTICS
[5]  
Brewster D., 1815, PHILOS T R SOC LONDO, V105, P60, DOI DOI 10.1098/RSTL.1815.0006
[6]   1.3 μm light amplification in dye-doped hybrid sol-gel channel waveguides [J].
Casalboni, M ;
De Matteis, F ;
Merlo, V ;
Prosposito, P ;
Russo, R ;
Schutzmann, S .
APPLIED PHYSICS LETTERS, 2003, 83 (03) :416-418
[7]  
DITCHBURN RW, 1995, J OPT SOC AM, V45, P473
[8]   Dye-doped zirconia-based Ormosil planar waveguides: optical properties and surface morphology [J].
Giorgetti, E ;
Margheri, G ;
Sottini, S ;
Casalboni, M ;
Senesi, R ;
Scarselli, M ;
Pizzoferrato, R .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1999, 255 (2-3) :193-198
[9]   EXAMINATION OF THIN SIO2-FILMS ON SI USING SPECTROSCOPIC POLARIZATION MODULATION ELLIPSOMETRY [J].
JELLISON, GE .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (11) :7627-7634
[10]   Refractive index measurement of pure and Er3+-doped ZrO2-SiO2 sol-gel film by using the Brewster angle technique [J].
Luna-Moreno, D ;
De la Rosa-Cruz, E ;
Cuevas, FJ ;
Regalado, LE ;
Salas, P ;
Rodríguez, R ;
Castaño, VM .
OPTICAL MATERIALS, 2002, 19 (02) :275-281