Ultralow-profile micromachined power inductors with highly laminated Ni/Fe cores: Application to low-megahertz DC-DC converters

被引：49

作者：

Park, JW ^{[1
]}

Allen, MG ^{[1
]}

机构：

[1] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2003年 / 39卷 / 05期

关键词：

DC-DC converter; eddy current; magnetic core lamination; micromachining; power inductor;

D O I：

10.1109/TMAG.2003.816051

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Micromachined inductors with submillimeter profiles and comparable electrical performance to thicket, commercially-available surface-mount devices, have been fabricated and characterized for low-megahertz dc-dc converters. The fabrication approach involves micron-scale lamination of Ni/Fe cores, combined with three-dimensional micromachined copper windings. The magnetic core of the fabricated inductor has 72 laminations of 1-mum-thick Ni/Fe films. The inductor dimension is 11.5 x 5.7 x 0.7 mm, and the dc resistance is 150 mOmega. A maximum Q of M at 3 MHz with an inductance value of 2.3 muH and a dc saturation current (I80) of 0.2 A were obtained. Use of this inductor in a regulated dc-dc boost converter circuit (7-12 V) operating at 2.2 MHz yielded 1.9-W power output at 71% efficiency.

引用

页码：3184 / 3186

页数：3

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