Transparent conducting ZnO:Al films deposited on organic substrates deposited by r.f. magnetron-sputtering

被引：209

作者：

Yang, TL

Zhang, DH ^{[1
]}

Ma, J

Ma, HL

Chen, Y

机构：

[1] Shandong Univ, Dept Phys, Shandong 250100, Peoples R China

[2] Shandong Univ, Inst Optoelect Mat & Devices, Shandong 250100, Peoples R China

来源：

THIN SOLID FILMS | 1998年 / 326卷 / 1-2期

关键词：

ZnO : Al films; organic substrates; magnetron sputtering;

D O I：

10.1016/S0040-6090(98)00763-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Transparent conducting ZnO:Al films with good adhesion and low resistivity have been prepared on organic substrales by r.f. magnetron-sputtering. Polycrystalline ZnO:Al films having a preferred orientation were obtained with resistivity 1.84 x 10(-3) Omega cm, carrier concentration 4.62. x 10(20) cm(-3) and Hall mobility 7.34 cm(2)/v per s. The average transmittance of the films is 84% in the wavelength range of the visible spectrum. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：60 / 62

页数：3

共 6 条

[1] ELECTRICAL AND OPTICAL-PROPERTIES OF INDIUM TIN OXIDE THIN-FILMS DEPOSITED ON UNHEATED SUBSTRATES BY DC REACTIVE SPUTTERING [J].