Preparation and properties of indium tin oxide films deposited on polyester substrates by reactive evaporation

被引：32

作者：

Ma, J ^{[1
]}

Li, SY ^{[1
]}

Zhao, JQ ^{[1
]}

Ma, HL ^{[1
]}

机构：

[1] Shandong Univ, Inst Optoelect Mat & Devices, Jinan 250100, Peoples R China

来源：

THIN SOLID FILMS | 1997年 / 307卷 / 1-2期

关键词：

indium tin oxide; polyester substrate; reactive evaporation;

D O I：

10.1016/S0040-6090(97)00203-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Highly transparent conducting indium tin oxide (ITO) films have been prepared on polyester thin film substrate by reactively evaporating metal Ln-Sn alloy in a system with an oxygen partial pressure of (3-30) X 10(-5) Torr and substrate temperatures between 80 and 240 degrees C. The structure and opto-electrical properties of the films depending on the deposition conditions have been investigated. High quality films with a average transparency of 83% and the resistivity of 7 X 10(-5) Ohm cm have been obtained by controlling the deposition parameters. (C) 1997 Elsevier Science S.A.

引用

页码：200 / 202

页数：3

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