PROPERTIES OF INDIUM TIN OXIDE THIN-FILMS PREPARED BY REACTIVE EVAPORATION

被引：51

作者：

HABERMEIER, HU

机构：

来源：

THIN SOLID FILMS | 1981年 / 80卷 / 1-3期

关键词：

Compendex;

D O I：

10.1016/0040-6090(81)90218-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

INDIUM COMPOUNDS

引用

页码：157 / 160

页数：4

共 16 条

[1] STRUCTURE OF INDIUM OXIDE TIN OXIDE TRANSPARENT CONDUCTING FILMS BY ELECTRON-DIFFRACTION AND ELECTRON SPECTROSCOPY [J].

BOSNELL, JR ;

WAGHORNE, R .

THIN SOLID FILMS, 1973, 15 (02) :141-148

[2] PROPERTIES OF SN-DOPED IN2O3 FILMS PREPARED BY RF SPUTTERING [J].

FAN, JCC ;

BACHNER, FJ .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (12) :1719-1725

[3]

FRASER DB, 1972, J ELECTROCHEM SOC, V119, P1308

[4]

GLASER HJ, 1977, GLASTECH BER, V50, P266

[5] UNTERSUCHUNGEN AN HALBLEITENDEN INDIUMOXYDSCHICHTEN [J].

GROTH, R .

PHYSICA STATUS SOLIDI, 1966, 14 (01) :69-&

[6] EFFECTS OF HEAT-TREATMENT ON OPTICAL AND ELECTRICAL-PROPERTIES OF INDIUM-TIN OXIDE-FILMS [J].

HAINES, WG ;

BUBE, RH .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (01) :304-307

[7]

HEQ M, 1973, THIN SOLID FILMS, V18, P117

[8] CHEMICAL VAPOR-DEPOSITION OF TRANSPARENT ELECTRICALLY CONDUCTING LAYERS OF INDIUM OXIDE DOPED WITH TIN [J].

KANE, J ;

SCHWEIZER, HP ;

KERN, W .

THIN SOLID FILMS, 1975, 29 (01) :155-163

[9]

MANIFACIER JC, 1978, MATER RES B, V13, P109

[10] ELECTRICAL AND OPTICAL PROPERTIES OF SPUTTERED IN2O3 FILMS .I. ELECTRICAL PROPERTIES AND INTRINSIC ABSORPTION [J].

MULLER, HK .

PHYSICA STATUS SOLIDI, 1968, 27 (02) :723-&

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