High quality nanoelectromechanical microwave resonator based on a carbon nanotube array

被引：6

作者：

Dragoman, M. ^{[1
]}

Neculoiu, D. ^{[1
]}

Cismaru, A. ^{[1
]}

Dragoman, D. ^{[2
]}

Grenier, K. ^{[3
]}

Pacchini, S. ^{[3
]}

Mazenq, L. ^{[3
]}

Plana, R. ^{[3
]}

机构：

[1] Natl Res & Dev Inst Microtechnol, Bucharest 077190, Romania

[2] Univ Bucharest, Dept Phys, Bucharest 077125, Romania

[3] CNRS, LAAS, F-31077 Toulouse 4, France

来源：

APPLIED PHYSICS LETTERS | 2008年 / 92卷 / 06期

关键词：

D O I：

10.1063/1.2857541

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A brushlike array of metallic carbon nanotubes is integrated in a trench etched in a silicon substrate and terminated with two coplanar lines. When the incoming microwave signal frequency is equal to the mechanical resonance frequency of the nanotubes forming the array, a deep and narrow notch is formed in the microwave frequency response of the array, indicating that the array is acting like a resonator. The quality factor of the array at the fundamental resonance frequency of 1.4 GHz is around 800 at room temperature. (c) 2008 American Institute of Physics.

引用

页数：3

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