Electromechanical resonators from graphene sheets

被引:2525
作者
Bunch, J. Scott
van der Zande, Arend M.
Verbridge, Scott S.
Frank, Ian W.
Tanenbaum, David M.
Parpia, Jeevak M.
Craighead, Harold G.
McEuen, Paul L. [1 ]
机构
[1] Cornell Univ, Cornell Ctr Mat Res, Ithaca, NY 14853 USA
[2] Pomona Coll, Dept Phys, Claremont, CA 91711 USA
关键词
D O I
10.1126/science.1136836
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Nanoelectromechanical systems were fabricated from single- and multilayer graphene sheets by mechanically exfoliating thin sheets from graphite over trenches in silicon oxide. Vibrations with fundamental resonant frequencies in the megahertz range are actuated either optically or electrically and detected optically by interferometry. We demonstrate room-temperature charge sensitivities down to 8 x 10(-4) electrons per root hertz. The thinnest resonator consists of a single suspended layer of atoms and represents the ultimate limit of two-dimensional nanoelectromechanical systems.
引用
收藏
页码:490 / 493
页数:4
相关论文
共 26 条
[1]   Coulomb oscillations and Hall effect in quasi-2D graphite quantum dots [J].
Bunch, JS ;
Yaish, Y ;
Brink, M ;
Bolotin, K ;
McEuen, PL .
NANO LETTERS, 2005, 5 (02) :287-290
[2]   Suspended microchannel resonators for biomolecular detection [J].
Burg, TP ;
Manalis, SR .
APPLIED PHYSICS LETTERS, 2003, 83 (13) :2698-2700
[3]   A nanometre-scale mechanical electrometer [J].
Cleland, AN ;
Roukes, ML .
NATURE, 1998, 392 (6672) :160-162
[4]   Nanoelectromechanical systems [J].
Craighead, HG .
SCIENCE, 2000, 290 (5496) :1532-1535
[5]   Nanoelectromechanical systems [J].
Ekinci, KL ;
Roukes, ML .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2005, 76 (06)
[6]   Ultrasensitive nanoelectromechanical mass detection [J].
Ekinci, KL ;
Huang, XMH ;
Roukes, ML .
APPLIED PHYSICS LETTERS, 2004, 84 (22) :4469-4471
[7]   Raman spectrum of graphene and graphene layers [J].
Ferrari, A. C. ;
Meyer, J. C. ;
Scardaci, V. ;
Casiraghi, C. ;
Lazzeri, M. ;
Mauri, F. ;
Piscanec, S. ;
Jiang, D. ;
Novoselov, K. S. ;
Roth, S. ;
Geim, A. K. .
PHYSICAL REVIEW LETTERS, 2006, 97 (18)
[8]   Raman scattering from high-frequency phonons in supported n-graphene layer films [J].
Gupta, A. ;
Chen, G. ;
Joshi, P. ;
Tadigadapa, S. ;
Eklund, P. C. .
NANO LETTERS, 2006, 6 (12) :2667-2673
[9]   Attogram detection using nanoelectromechanical oscillators [J].
Ilic, B ;
Craighead, HG ;
Krylov, S ;
Senaratne, W ;
Ober, C ;
Neuzil, P .
JOURNAL OF APPLIED PHYSICS, 2004, 95 (07) :3694-3703
[10]  
Kelly BT, 1981, PHYS GRAPHITE