Copper corrosion monitoring with total internal reflection ellipsometry

被引:13
作者
Poksinski, M [1 ]
Dzuho, H [1 ]
Arwin, H [1 ]
机构
[1] Linkoping Univ, Dept Phys & Measurement Technol, Lab Appl Opt, SE-58183 Linkoping, Sweden
关键词
D O I
10.1149/1.1618224
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
A technique for in situ monitoring of changes on surfaces of semitransparent thin films is presented. This technique combines ellipsometry and total internal reflection and is called total internal reflection ellipsometry. It utilizes the high surface sensitivity of ellipsometry and can be applied to detect and quantify very small changes on thin film surfaces. One example on an application is corrosion monitoring. The main advantage in comparison to ordinary ellipsometry is that measurements are done from the "back side'' of the sample and thus the probe beam does not propagate through and will not be influenced by the media reacting with the surface. An overview of total internal reflection ellipsometry and results from corrosion monitoring on thin copper films are presented. (C) 2003 The Electrochemical Society. All rights reserved.
引用
收藏
页码:B536 / B539
页数:4
相关论文
共 17 条
[1]  
[Anonymous], 1998, CORROSION SCI TECHNO
[2]  
[Anonymous], 1996, INTRO OPTICS
[3]   Is ellipsometry suitable for sensor applications? [J].
Arwin, H .
SENSORS AND ACTUATORS A-PHYSICAL, 2001, 92 (1-3) :43-51
[4]   INVESTIGATION OF EFFECTIVE-MEDIUM MODELS OF MICROSCOPIC SURFACE-ROUGHNESS BY SPECTROSCOPIC ELLIPSOMETRY [J].
ASPNES, DE ;
THEETEN, JB .
PHYSICAL REVIEW B, 1979, 20 (08) :3292-3302
[5]  
Atkins P. W., 1990, GEN CHEM
[6]   Amperometric glucose sensor based on glucose oxidase immobilized in electrochemically generated poly(ethacridine) [J].
Xu, JJ ;
Chen, HY .
ANALYTICA CHIMICA ACTA, 2000, 423 (01) :101-106
[7]   The electrochemical behaviour of copper in alkaline solutions containing fluoride, studied by in situ ellipsometry [J].
Berlouis, LEA ;
Mamman, DA ;
Azpuru, IG .
SURFACE SCIENCE, 1998, 408 (1-3) :173-181
[8]  
Cantini NJ, 2000, ELECTROCHEM SOLID ST, V3, P275, DOI 10.1149/1.1391123
[9]  
COLLINS RW, 1997, 2 INT C SPECTR ELL C
[10]   Imaging surface plasmon resonance sensor based on multiple wavelengths:: Sensitivity considerations [J].
Johansen, K ;
Arwin, H ;
Lundström, I ;
Liedberg, B .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2000, 71 (09) :3530-3538