Is ellipsometry suitable for sensor applications?

被引:61
作者
Arwin, H [1 ]
机构
[1] Linkoping Univ, Dept Phys & Measurement Technol, Lab Appl Opt, SE-58183 Linkoping, Sweden
基金
瑞典研究理事会;
关键词
ellipsometry; affinity biosensors; gas sensors; capillary condensation;
D O I
10.1016/S0924-4247(01)00538-6
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Ellipsometry is a powerful tool for optical characterization of surfaces and thin-films. Very favorable features for sensor applications are the in situ advantage, the possibility to work with non-labeled molecules and the high thickness resolution. Sub-nanometers resolution can be achieved in bioaffinity-based sensing and ppm-sensitivity in gas sensing. Ellipsometric sensor systems are based on monitoring changes in the thickness, the refractive index or the microstructure of a sensing layer. These changes are induced by the substance or process measured. A classification of sensing layers is proposed and discussed. One specific application, gas sensing based on sensor arrays, is discussed in some detail. However, the main objective is to critically discuss the possibilities for sensor applications based on ellipsometric read-out. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:43 / 51
页数:9
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