Growth and characterization of ultrathin zirconia dielectrics grown by ultraviolet ozone oxidation

被引:60
作者
Ramanathan, S [1 ]
Wilk, GD
Muller, DA
Park, CM
McIntyre, PC
机构
[1] Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA
[2] Agere Syst, Elect Device Res Lab, Murray Hill, NJ 07974 USA
[3] Bell Labs, Lucent Technol, Murray Hill, NJ 07974 USA
关键词
D O I
10.1063/1.1410871
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this letter, we report on the growth of ultrathin films of zirconia on silicon oxide and silicon oxynitride passivated (001) Si by ultraviolet ozone oxidation of Zr metal precursor layers. The oxidation kinetics has been measured using an accelerator-based nuclear reaction analysis. It was found that oxide films up to 55 Angstrom could be grown at room temperature by oxidation at 600 Torr while oxidation at 80 mTorr is self-limiting at 20 Angstrom. The interfaces between the dielectric and the substrate have been characterized by scanning transmission electron microscopy. The ZrO2 films were found to be crystalline as grown. Electrical measurements on capacitor structures with 30-Angstrom -thick ZrO2 films grown on native oxide on silicon show a capacitance-voltage hysteresis of 15 mV and a capacitance-based equivalent oxide thickness of 17 Angstrom at 100 kHz. (C) 2001 American Institute of Physics.
引用
收藏
页码:2621 / 2623
页数:3
相关论文
共 18 条
[1]   MIGRATION OF METAL AND OXYGEN DURING ANODIC FILM FORMATION [J].
DAVIES, JA ;
DOMEIJ, B ;
PRINGLE, JPS ;
BROWN, F .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1965, 112 (07) :675-&
[2]  
DOHAN JM, 1987, OZONE-SCI ENG, V9, P315
[3]  
Egerton R. F, 1996, ELECT ENERGY LOSS SP
[4]   ADSORPTION AND OXIDE FORMATION ON ALUMINIUM FILMS [J].
ELEY, DD ;
WILKINSON, PR .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1960, 254 (1278) :327-342
[5]   Thermodynamic stability of binary oxides in contact with silicon [J].
Hubbard, KJ ;
Schlom, DG .
JOURNAL OF MATERIALS RESEARCH, 1996, 11 (11) :2757-2776
[6]  
Ichimura S, 2000, SURF INTERFACE ANAL, V30, P497, DOI 10.1002/1096-9918(200008)30:1<497::AID-SIA791>3.0.CO
[7]  
2-0
[8]   LOW-TEMPERATURE SILICON SURFACE CLEANING BY HF ETCHING ULTRAVIOLET OZONE CLEANING (HF/UVOC) METHOD .2. - INSITU UVOC [J].
KANEKO, T ;
SUEMITSU, M ;
MIYAMOTO, N .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1989, 28 (12) :2425-2429
[9]   LOW-TEMPERATURE PHOTO-ASSISTED OXIDATION OF SILICON [J].
KAZOR, A ;
BOYD, IW .
APPLIED SURFACE SCIENCE, 1992, 54 :460-464
[10]   Structural properties and quasiparticle band structure of zirconia [J].
Kralik, B ;
Chang, EK ;
Louie, SG .
PHYSICAL REVIEW B, 1998, 57 (12) :7027-7036