Pulsed laser deposition of mesoporous niobium oxide thin films and application as chemical sensors

被引:73
作者
Gimon-Kinsel, ME [1 ]
Balkus, KJ [1 ]
机构
[1] Univ Texas, Dept Chem, Richardson, TX 75083 USA
关键词
laser ablation; molecular sieve; sensors; thin films;
D O I
10.1016/S1387-1811(98)00291-1
中图分类号
O69 [应用化学];
学科分类号
081704 ;
摘要
The pulsed laser deposition (PLD) of a mesoporous niobium oxide, Nb-TMS1, and post-hydrothermal treatment result in mesoporous thin films (90 nm-3 mu m thick) having what appears to be a three-dimensional disordered hexagonal or 'wormhole' structure. These films were characterized by FT-IR spectroscopy, X-ray diffraction, scanning electron microscopy and transmission electron microscopy. The mesoporous Nb-TMS1 thin films were employed as the dielectric phase in capacitive-type chemical sensors. These sensors produce a capacitance change upon the reversible absorption of volatile compounds into the molecular sieve pores. The molecular sieve based sensors were exposed to a variety of analytes, including N-2, CO2, H2O, NH3, methanol and acetone. The mesoporous niobium oxide based sensors were found to be particularly good humidity sensors, exhibiting capacitance changes at least 10 times greater than that for N-2, ammonia, methanol and acetone. The Nb-TMS1 based sensors also showed responses to H2O that were 1000 times greater than for dense Nb2O5 based sensors prepared by PLD. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:113 / 123
页数:11
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