Thermopile sensor-devices for the catalytic detection of hydrogen gas

被引：22

作者：

Houlet, Lionel Fabrice ^{[1
]}

Shin, Woosuck ^{[1
]}

Tajima, Kazuki ^{[1
]}

Nishibori, Maiko ^{[1
]}

Izu, Noriya ^{[1
]}

Roh, Toshio ^{[1
]}

Matsubara, Ichiro ^{[1
]}

机构：

[1] AIST, Adv Mfg Res Inst, Moriyama Ku, Nagoya, Aichi 4638560, Japan

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2008年 / 130卷 / 01期

关键词：

thermopile; hydrogen; micro-sensor; SiGe; thermoelectric; catalyst;

D O I：

10.1016/j.snb.2007.07.119

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

We present the fabrication and the performance of a micro-thermoelectric hydrogen gas sensor built with a thermopile composed of 18 thermocouples on a dielectric thin membrane. Every thin film thermocouple is a pair of Au- and boron-doped Si0.8Ge0.2 thin films deposited by sputtering with the thickness of 200 and 300 nm, respectively. The gas detection of the sensor is triggered by the catalytic combustion of hydrogen and the thermopile converts the combustion heat to electric voltage and current. The performance of the device is studied with respect to the design of the heater, the thermopile, and the catalyst on the membrane. The sensor-device with the thermopile is also compared to a sensor with a single thermoelectric couple. The device built with the thermopile shows 11-fold amplification voltage signal and a thermopower 15 times than the single thermoelectric line device. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：200 / 206

页数：7

共 13 条

[1] An uncooled infrared focal plane array for low-cost applications fabricated with standard CMOS technology [J].

Calaza, C. ;

Viarani, N. ;

Pedretti, G. ;

Gottardi, M. ;

Simoni, A. ;

Zanini, V. ;

Zen, M. .

SENSORS AND ACTUATORS A-PHYSICAL, 2006, 132 (01) :129-138

[2] Micro-differential scanning calorimeter for combustible gas sensing [J].

Cavicchi, RE ;

Poirier, GE ;

Tea, NH ;

Afridi, M ;

Berning, D ;

Hefner, A ;

Suehle, I ;

Gaitan, M ;

Semancik, S ;

Montgomery, C .

SENSORS AND ACTUATORS B-CHEMICAL, 2004, 97 (01) :22-30

[3] THERMOPILES FABRICATED USING SILICON PLANAR TECHNOLOGY [J].

NIEVELD, GD .

SENSORS AND ACTUATORS, 1983, 3 (02) :179-183

[4] Catalyst combustors with B-Doped SiGe/Au thermopile for micro-power-generation [J].

Nishibori, Maiko ;

Shin, Woosuck ;

Tajima, Kazuki ;

Houlet, Lionel F. ;

Izu, Noriya ;

Matsubara, Ichiro ;

Murayama, Norimitsu .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2006, 45 (42-45) :L1130-L1132

[5] New structural design of micro-thermoelectric sensor for wide range hydrogen detection [J].

Nishibori, Maiko ;

Shin, Woosuck ;

Houlet, Lionel F. ;

Tajima, Kazuki ;

Itoh, Toshio ;

Izu, Noriya ;

Murayama, Norimitsu ;

Matsubara, Ichiro .

JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 2006, 114 (1334) :853-856

[6] 2-DIMENSIONAL INTEGRATED GAS-FLOW SENSORS BY CMOS IC TECHNOLOGY [J].

ROBADEY, J ;

PAUL, O ;

BALTES, H .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1995, 5 (03) :243-250

[7] CMOS-compatible fabrication of thermopiles with high sensitivity in the 3-5 μm atmospheric window [J].

Roncaglia, A. ;

Mancarella, F. ;

Cardinali, G. C. .

SENSORS AND ACTUATORS B-CHEMICAL, 2007, 125 (01) :214-223

[8]

SCHILZ J, APPL THERMOELECTRIC

[9]

SHIEFERDECKER J, 1995, SENSOR ACTUAT A-PHYS, V46, P422

[10] Hydrogen-selective thermoelectric gas sensor [J].

Shin, W ;

Matsumiya, M ;

Izu, N ;

Murayama, N .

SENSORS AND ACTUATORS B-CHEMICAL, 2003, 93 (1-3) :304-308

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